Analysis of fabrication misalignment effects in a MEMS-based electron-optical system design for direct-write lithography

Sheng-Yung ChenChieh-Chien HuangShin-Chuan ChenTing-Han PeiKuen-Yu TsaiKUEN-YU TSAI2018-09-102018-09-102010-06http://scholars.lib.ntu.edu.tw/handle/123456789/359314Analysis of fabrication misalignment effects in a MEMS-based electron-optical system design for direct-write lithographyconference paper