Design and fabrication of 2D phononic crystals in surface acoustic wave micro devices

Gu, K.K.GuShieh, J.-C.J.-C.ShiehShih, W.-P.W.-P.Shih2013-04-112018-06-282013-04-112018-06-282005http://ntur.lib.ntu.edu.tw//handle/246246/257180en-US[SDGs]SDG7Design and fabrication of 2D phononic crystals in surface acoustic wave micro devicesconference paper10.1115/IMECE2005-82692