國立臺灣大學電子工程學研究所呂學士2006-07-262018-07-102006-07-262018-07-102005-07-31http://ntur.lib.ntu.edu.tw//handle/246246/20035本計畫將微機電製程應用於標準之 CMOS 射頻電路，應用範圍包括微機電式電 感，低雜訊放大器，壓控震盪器，混波器， 以及分布式放大器，目的是將標準矽製程電 感下的矽基板掏空，並提高電感之品質因 數，以增進射頻電路的功能。The project is proposed to implement micromachining processes in the standard CMOS RF circuits. This idea is realized in the RF front-end including MEMS inductor, low noise amplifier, mixer, voltage control oscillator, and distributed amplifier. The aim is to remove the lossy silicon underneath the inductors, which can increase the quality factors of them and improve the performance of the RFICs.application/pdf173674 bytesapplication/pdfzh-TW國立臺灣大學電子工程學研究所微機電射頻電路電感MEMSRFICinductorreporthttp://ntur.lib.ntu.edu.tw/bitstream/246246/20035/1/932212E002079.pdf