Development of a micro hole measuring system based on the capacitance principle

Chang, T.-Y.T.-Y.ChangLiao, Y.-S.Y.-S.LiaoLiu, W.-C.W.-C.LiuYUNN-SHIUAN LIAO2020-01-132020-01-132009https://scholars.lib.ntu.edu.tw/handle/123456789/448654Development of a micro hole measuring system based on the capacitance principlejournal article10.1088/0957-0233/20/10/1051042-s2.0-70350678598https://www.scopus.com/inward/record.uri?eid=2-s2.0-70350678598&doi=10.1088%2f0957-0233%2f20%2f10%2f105104&partnerID=40&md5=3b48aba9d847d315d84aa1beefeefd67