Robust QFT control of a piezo-based vibration isolation system with consideration of hysteresis effect

Tsai M.-S.Chiang F.-C.Sun Y.-S.Wu J.-H.2019-07-042019-07-0420040791841731; 9780791841730https://www.scopus.com/inward/record.uri?eid=2-s2.0-8844256632&partnerID=40&md5=d3450fe78ad4c27125f48d03f0c6ab25https://scholars.lib.ntu.edu.tw/handle/123456789/412720Robust QFT control of a piezo-based vibration isolation system with consideration of hysteresis effectconference paper10.1115/esda2004-581652-s2.0-8844256632