An embedded image processing and feedback compensation for the vibration-resistance system using white light interferometer

Tseng, S.P.S.P.TsengChen, L.-C.L.-C.ChenHo, C.C.HoSheng, C.-Y.C.-Y.ShengLIANG-CHIA CHEN2020-01-132020-01-132011https://scholars.lib.ntu.edu.tw/handle/123456789/447860An embedded image processing and feedback compensation for the vibration-resistance system using white light interferometerconference paper10.1117/12.9050612-s2.0-84855315670https://www.scopus.com/inward/record.uri?eid=2-s2.0-84855315670&doi=10.1117%2f12.905061&partnerID=40&md5=1918b8424695bdaf206c54df54339969