Lee, KYKYLeeLee, WCWCLeeHung, MLMLHungLee, YCYCLeeChang, CHCHChangChiou, YKYKChiouMINGHWEI HONGKwo, JJKwo2018-09-102018-09-102006http://scholars.lib.ntu.edu.tw/handle/123456789/323234A Novel Template Approach by MBE for ALD Growth of High k Dielectricsconference paper