Ablation of silicon by focusing a femtosecond laser through a subwavelength annular aperture structure

Yu, Y.Y.Y.Y.YuChang, C.K.C.K.ChangLai, M.W.M.W.LaiHuang, L.S.L.S.HuangCHIH-KUNG LEE2020-04-282020-04-282010https://scholars.lib.ntu.edu.tw/handle/123456789/486185[SDGs]SDG7Ablation of silicon by focusing a femtosecond laser through a subwavelength annular aperture structureconference paper10.1117/12.8598542-s2.0-77958168183https://www.scopus.com/inward/record.uri?eid=2-s2.0-77958168183&doi=10.1117%2f12.859854&partnerID=40&md5=3ef25dd1bae507ab65512c8fd04f2ff6