Robust Control of a Two-Axis Piezoelectric Nano-Positioning Stage

Wang, Fu-ChengFu-ChengWangTsai, Yan-ChenYan-ChenTsaiHsieh, Chin-HuiChin-HuiHsiehChen, Lian-ShengLian-ShengChenYu, Chung-HuangChung-HuangYu2013-02-062018-06-282013-02-062018-06-282011http://ntur.lib.ntu.edu.tw//handle/246246/246665en-USRobust Control of a Two-Axis Piezoelectric Nano-Positioning Stageconference paperhttp://ntur.lib.ntu.edu.tw/bitstream/246246/246665/-1/07.pdf