Investigation of the Microstructure, Porosity, Adhesion, and Optical Properties of a WO<inf>3</inf> Film Fabricated Using an E-Beam System With Ion Beam-Assisted Deposition

Chiu, P.-K.P.-K.ChiuChiang, D.D.ChiangLee, C.-T.C.-T.LeeHsiao, C.-N.C.-N.HsiaoYang, J.-R.J.-R.YangCho, W.-H.W.-H.ChoChen, H.-P.H.-P.ChenHuang, C.L.C.L.HuangJER-REN YANG2020-05-122020-05-122014https://scholars.lib.ntu.edu.tw/handle/123456789/491549Investigation of the Microstructure, Porosity, Adhesion, and Optical Properties of a WO<inf>3</inf> Film Fabricated Using an E-Beam System With Ion Beam-Assisted Depositionjournal article10.1109/TMAG.2013.22974502-s2.0-84957570574https://www.scopus.com/inward/record.uri?eid=2-s2.0-84957570574&doi=10.1109%2fTMAG.2013.2297450&partnerID=40&md5=8c77693efe1181efe51321496cb52b40