Oxygen-deficient indium tin oxide thin films annealed by atmospheric pressure plasma jets with/without air-quenching

Liao, W.-Y.W.-Y.LiaoChang, H.H.ChangYang, Y.-J.Y.-J.YangHsu, C.-C.C.-C.HsuCheng, I.-C.I.-C.ChengJIAN-ZHANG CHEN2020-06-162020-06-162014https://scholars.lib.ntu.edu.tw/handle/123456789/502031[SDGs]SDG6Oxygen-deficient indium tin oxide thin films annealed by atmospheric pressure plasma jets with/without air-quenchingjournal article10.1016/j.apsusc.2013.11.1182-s2.0-84893644647https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893644647&doi=10.1016%2fj.apsusc.2013.11.118&partnerID=40&md5=4d145512011301aa16bff31bbd3c68b7