Fundamental Study and Oxide Reliability of the MBE-Grown Ga 2- x Gd x O 3 Dielectric Oxide for Compound Semiconductor MOSFETs

Kwo, JJKwoMINGHWEI HONGMannaerts, JPJPMannaertsLee, YJYJLeeWu, YDYDWuLee, WGWGLeeMilkap, SSMilkapYang, BBYangGustaffson, TTGustaffson2018-09-102018-09-102004http://scholars.lib.ntu.edu.tw/handle/123456789/308680Fundamental Study and Oxide Reliability of the MBE-Grown Ga 2- x Gd x O 3 Dielectric Oxide for Compound Semiconductor MOSFETsjournal article