Design and experiment of a macro-micro planar maglev positioning system

Chen, M.-Y.M.-Y.ChenLin, T.-B.T.-B.LinHung, S.-K.S.-K.HungFu, L.-C.L.-C.FuLI-CHEN FU2018-09-102018-09-102012http://www.scopus.com/inward/record.url?eid=2-s2.0-84862993042&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/372663Design and experiment of a macro-micro planar maglev positioning systemjournal article10.1109/TIE.2011.2174531