Su, An-JhihAn-JhihSuJeng, Jyh-ChengJyh-ChengJengHuang, Hsiao-PingHsiao-PingHuangYu, Cheng-ChingCheng-ChingYuHung, Shih-YuShih-YuHungChao, Ching-KongChing-KongChao2010-09-152018-06-282010-09-152018-06-282007-11http://ntur.lib.ntu.edu.tw//handle/246246/202500en-USContorl Relevant Issues in Semiconductor Manufacyuring--Overview with Some New Resultsjournal article