Direct writing of silicon gratings with highly coherent ultraviolet laser

CHEE-WEE LIUChao, C.-Y.C.-Y.ChaoChen, C.-Y.C.-Y.ChenLiu, C.-W.C.-W.LiuChang, Y.Y.ChangYang, C.C.C.C.YangCHEE-WEE LIU2018-09-102018-09-101997http://www.scopus.com/inward/record.url?eid=2-s2.0-0031588236&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/332404application/pdfapplication/pdfDirect writing of silicon gratings with highly coherent ultraviolet laserjournal article