Lay, EddyEddyLaySong, Yi-HwaYi-HwaSongChiu, Yuan-ChiehYuan-ChiehChiuLin, Yang-MiinYang-MiinLinChi, YunYunChiCarty, Arthur J.Arthur J.CartyPeng, Shie-MingShie-MingPengLee, Gene-HsiangGene-HsiangLee2009-09-282018-07-102009-09-282018-07-102005http://ntur.lib.ntu.edu.tw//handle/246246/168245application/pdf400426 bytesapplication/pdfen-USNew CVD Precursors Capable of Depositing Copper Metal under Mixed O2/Ar Atmospherejournal article10.1002/chin.200550212http://ntur.lib.ntu.edu.tw/bitstream/246246/168245/1/409.pdf