Semi-insulating crystalline silicon formed by oxygen doping during low-temperature chemical vapor deposition

CHEE-WEE LIUSchwartz, P.V.P.V.SchwartzLiu, C.W.C.W.LiuSturm, J.C.J.C.SturmCHEE-WEE LIU2018-09-102018-09-101993http://www.scopus.com/inward/record.url?eid=2-s2.0-0041815094&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/303374Semi-insulating crystalline silicon formed by oxygen doping during low-temperature chemical vapor depositionjournal article10.1063/1.108755