Laser ablation of silicon using a Bessel-like beam generated by a subwavelength annular aperture structure

Yu, Y.-Y.Y.-Y.YuChang, C.-K.C.-K.ChangLai, M.-W.M.-W.LaiHuang, L.-S.L.-S.HuangCHIH-KUNG LEE2020-04-282020-04-282011https://scholars.lib.ntu.edu.tw/handle/123456789/486169Laser ablation of silicon using a Bessel-like beam generated by a subwavelength annular aperture structurejournal article10.1364/AO.50.0063842-s2.0-83155193108https://www.scopus.com/inward/record.uri?eid=2-s2.0-83155193108&doi=10.1364%2fAO.50.006384&partnerID=40&md5=1cd035d96b6951c705d5e61a9634a20b