A three-axis magnetic field microsensor fabricated utilizing a CMOS process

Tseng, J.-Z.J.-Z.TsengShih, P.-J.P.-J.ShihHsu, C.-C.C.-C.HsuDai, C.-L.C.-L.DaiPO-JEN SHIH2020-02-262020-02-262017https://scholars.lib.ntu.edu.tw/handle/123456789/464344A three-axis magnetic field microsensor fabricated utilizing a CMOS processjournal article10.3390/app71212892-s2.0-85037741892https://www.scopus.com/inward/record.uri?eid=2-s2.0-85037741892&doi=10.3390%2fapp7121289&partnerID=40&md5=a3d2bf75b4565053b64ed9f2f48a6c52