Greatly improved interfacial passivation of in-situ high $κ$ dielectric deposition on freshly grown molecule beam epitaxy Ge epitaxial layer on Ge (100)

Chu, RLRLChuLiu, YCYCLiuLee, WCWCLeeLin, TDTDLinHuang, MLMLHuangPi, TWTWPiKwo, JJKwoMINGHWEI HONG2018-09-102018-09-102014http://scholars.lib.ntu.edu.tw/handle/123456789/386510Greatly improved interfacial passivation of in-situ high $κ$ dielectric deposition on freshly grown molecule beam epitaxy Ge epitaxial layer on Ge (100)journal article