臺灣大學: 電子工程學研究所王維新蔡英哲Tsai, Ying-JheYing-JheTsai2013-04-102018-07-102013-04-102018-07-102010http://ntur.lib.ntu.edu.tw//handle/246246/256984本論文探討在照射過伽瑪射線的z-cut鈮酸鋰基板，以質子交換與濕式蝕刻法製作脊形結構，並利用此結構製作馬赫任德電光調變器。為瞭解脊形結構之改善情形，本研究採用表面輪廓儀與電子顯微鏡量測脊形結構的外觀比；實驗數據顯示，在照射過伽瑪射線的鈮酸鋰基板上製作的脊形結構的縱深增加了約30%，外觀比改善了87%。又因為脊形結構之側壁較為垂直，亦加強了光場的侷限性，使得半波電壓由7.9V降為6V，改善幅度約為31%。In this thesis, ridge Mach-Zehnder modulator is successfully fabricated by using proton exchange wet etching in gamma ray irradiated z-cut lithium niobate. To characterize the effect of gamma ray irradiation, the depth and the aspect ratio of the ridge structure are measured by surface profiler and electron microscope. Experimental results show that the depth and the aspect ratio of the gamma ray irradiated ridge structure are increased by about 30% and 87%, respectively. Owing to deeper vertical side walls, the optical field confinement is enhanced and the drive voltage is decreased from 7.9V to 6V.1721735 bytesapplication/pdfen-US伽瑪射線馬赫任?gamma raymach-zehnderthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/256984/1/ntu-99-R97943100-1.pdf