Nanoprojection lithography using self-assembled interference modules for manufacturing plasmonic gratings

Chuang, F.-T.F.-T.ChuangChen, P.-Y.P.-Y.ChenJiang, Y.-W.Y.-W.JiangFarhat, M.M.FarhatChen, H.-H.H.-H.ChenChen, Y.-C.Y.-C.ChenSI-CHEN LEE2020-06-112020-06-112012https://scholars.lib.ntu.edu.tw/handle/123456789/498851Nanoprojection lithography using self-assembled interference modules for manufacturing plasmonic gratingsjournal article10.1109/LPT.2012.22002482-s2.0-84862991258https://www.scopus.com/inward/record.uri?eid=2-s2.0-84862991258&doi=10.1109%2fLPT.2012.2200248&partnerID=40&md5=1c275733fd69044b7459f934badafcfc