Design and Fabrication of Micro Sensors Using Standard CMOS IC Process

Dai, Ching-LiangChing-LiangDaiChang, Pei-ZenPei-ZenChangWang, Jiann-JennJiann-JennWang2010-10-202018-06-292010-10-202018-06-291997-05http://ntur.lib.ntu.edu.tw//handle/246246/217977en-USDesign and Fabrication of Micro Sensors Using Standard CMOS IC Process