Chen, Y. J.Y. J.ChenFan, K. C.K. C.FanLiu, Y. S.Y. S.Liu2010-09-072018-06-282010-09-072018-06-282006-05http://ntur.lib.ntu.edu.tw//handle/246246/200113en-USAn Innovative Micro/nano Probe Measurement System for 3D Profile of Microstructurejournal article