范光照Fei, Y.T.Y.T.FeiYu, X.F.X.F.YuChen, Y.J.Y.J.ChenWang, W.L.W.L.WangChen, F.F.ChenLiu, Y.S.Y.S.LiuFan, K. C.K. C.Fan2009-05-152018-06-282009-05-152018-06-282005http://ntur.lib.ntu.edu.tw//handle/246246/156110en-USDevelopment of a Novel Micro-CMM for 3D Micro/nano Measurementsjournal article