Multi-layer bottom antireflective coating structures for high NA ArF exposure system applications

Chen, H.L.H.L.ChenFan, W.W.FanWang, T.J.T.J.WangHuang, T.Y.T.Y.HuangHSUEN-LI CHEN2020-05-122020-05-122002https://scholars.lib.ntu.edu.tw/handle/123456789/491383Multi-layer bottom antireflective coating structures for high NA ArF exposure system applicationsjournal article10.1117/12.4741842-s2.0-0036031355https://www.scopus.com/inward/record.uri?eid=2-s2.0-0036031355&doi=10.1117%2f12.474184&partnerID=40&md5=fadc41ae50311c72a2d2839091b3e718