RUEY-SHAN GUOGriffin R.Slama M.2020-03-062020-03-061994https://scholars.lib.ntu.edu.tw/handle/123456789/472425Agile Flow Control in Semiconductor Manufacturing: Simulation and Animation Demonstrationconference paper10.1109/ISSM.1994.729420https://www2.scopus.com/inward/record.uri?eid=2-s2.0-85063437248&doi=10.1109%2fISSM.1994.729420&partnerID=40&md5=0d611e0b4c261157065fc78cf62f41bd