Macromodels of 3D lateral viscous damping effects for MEMS devices

Yen, P.-C.P.-C.YenYang, Y.-J.Y.-J.YangYAO-JOE YANG2020-01-132020-01-132003https://scholars.lib.ntu.edu.tw/handle/123456789/448557Macromodels of 3D lateral viscous damping effects for MEMS devicesconference paper10.1109/SENSOR.2003.12171482-s2.0-6344262641https://www.scopus.com/inward/record.uri?eid=2-s2.0-6344262641&doi=10.1109%2fSENSOR.2003.1217148&partnerID=40&md5=33d5979a8cb0c981b12a9fc83332551e