Su, Guo-Dung J.Guo-Dung J.SuNguyen, HungHungNguyenPaterson, PamPamPatersonToshiyoshi, HiroshiHiroshiToshiyoshiWu, Ming C.Ming C.WuGUO-DUNG JOHN SU2018-09-102018-09-102000http://www.scopus.com/inward/record.url?eid=2-s2.0-0034547383&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/289852Surface-micromachined 2D optical scanners with high-performance single-crystalline silicon micromirrorsconference paper