Low-concentration ammonia gas sensors manufactured using the CMOS-MEMS technique

Shen, W.-C.W.-C.ShenShih, P.-J.P.-J.ShihTsai, Y.-C.Y.-C.TsaiHsu, C.-C.C.-C.HsuDai, C.-L.C.-L.DaiPO-JEN SHIH2021-02-042021-02-042020https://www.scopus.com/inward/record.url?eid=2-s2.0-85079184428&partnerID=40&md5=ba3383ed203a5f14421e247056f1664bhttps://scholars.lib.ntu.edu.tw/handle/123456789/546980Low-concentration ammonia gas sensors manufactured using the CMOS-MEMS techniquejournal article10.3390/mi11010092319521512-s2.0-85079184428WOS:000514309100091