DAR-ZEN CHENLee, B.-S.B.-S.Lee2020-01-132020-01-131999https://scholars.lib.ntu.edu.tw/handle/123456789/447189Pattern Planarization Model of Chemical Mechanical Polishingjournal article10.1149/1.13916742-s2.0-0033076595https://www.scopus.com/inward/record.uri?eid=2-s2.0-0033076595&doi=10.1149%2f1.1391674&partnerID=40&md5=b699f6f044460f45898100e9b3838b42