Yang, Y.-J.Y.-J.YangKuo, W.-C.W.-C.KuoYAO-JOE YANG2020-01-132020-01-132005https://scholars.lib.ntu.edu.tw/handle/123456789/448555A novel fabrication method for suspended high-aspect-ratio microstructuresjournal article10.1088/0960-1317/15/11/0272-s2.0-27144539841https://www.scopus.com/inward/record.uri?eid=2-s2.0-27144539841&doi=10.1088%2f0960-1317%2f15%2f11%2f027&partnerID=40&md5=57dc977a1662762a60cd5592567fbb18