Density gradient minimization with coupling-constrained dummy fill for CMP control

Chen, H.-Y.H.-Y.ChenChou, S.-J.S.-J.ChouYAO-WEN CHANG2018-09-102018-09-102010http://www.scopus.com/inward/record.url?eid=2-s2.0-77952246361&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/358169Density gradient minimization with coupling-constrained dummy fill for CMP controlconference paper10.1145/1735023.17350522-s2.0-77952246361