Newton interferometer with phase-shifting and phase-scanning measurement modes

Tr?nh, H.-X.H.-X.Tr?nhLin, S.-T.S.-T.LinChen, L.-C.L.-C.ChenYeh, S.-L.S.-L.YehHoang, H.-H.H.-H.HoangLIANG-CHIA CHEN2020-01-132020-01-132015https://scholars.lib.ntu.edu.tw/handle/123456789/447829Newton interferometer with phase-shifting and phase-scanning measurement modesjournal article10.1016/j.sna.2015.09.0012-s2.0-84941336048https://www.scopus.com/inward/record.uri?eid=2-s2.0-84941336048&doi=10.1016%2fj.sna.2015.09.001&partnerID=40&md5=1075353f8373dfb63d95bcb60a3694a3