Fundamental Understanding of Oxide Defects in HfO<inf>2</inf> and Y<inf>2</inf>O<inf>3</inf> on GaAs(001) with High Thermal Stability

Wan, H.W.H.W.WanHong, Y.J.Y.J.HongYoung, L.B.L.B.YoungMINGHWEI HONGKwo, J.J.Kwo2021-07-282021-07-282019https://www.scopus.com/inward/record.url?eid=2-s2.0-85066754786&partnerID=40&md5=fd43006c3e59d02ab4407bb466131eb5https://scholars.lib.ntu.edu.tw/handle/123456789/573743Fundamental Understanding of Oxide Defects in HfO<inf>2</inf> and Y<inf>2</inf>O<inf>3</inf> on GaAs(001) with High Thermal Stabilityconference paper10.1109/IRPS.2019.87204152-s2.0-85066754786