Improved near-infrared luminescence of Si-rich SiO<inf>2</inf> with buried Si nanocrystals grown by PECVD at optimized N<inf>2</inf>O fluence

Chen, C.-Y.C.-Y.ChenLin, C.-J.C.-J.LinKuo, H.-C.H.-C.KuoLin, G.-R.G.-R.LinChueh, Y.-L.Y.-L.ChuehChou, L.-J.L.-J.ChouChang, C.-W.C.-W.ChangGONG-RU LIN2020-06-112020-06-112005https://scholars.lib.ntu.edu.tw/handle/123456789/500159Improved near-infrared luminescence of Si-rich SiO<inf>2</inf> with buried Si nanocrystals grown by PECVD at optimized N<inf>2</inf>O fluenceconference paper10.1117/12.5879972-s2.0-23744460665https://www.scopus.com/inward/record.uri?eid=2-s2.0-23744460665&doi=10.1117%2f12.587997&partnerID=40&md5=e26e11619f05bcca5fec4da027985484