Robust control design for vibration isolation of an electron beam projection lithography system

FU-CHENG WANGHong, M.-F.M.-F.HongJIA-YUSH YENWang, Fu-ChengFu-ChengWangHong, Min-FengMin-FengHongYen, Jia-YushJia-YushYen2018-09-102018-09-102010http://www.scopus.com/inward/record.url?eid=2-s2.0-77955321322&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/356042Robust control design for vibration isolation of an electron beam projection lithography systemjournal article10.1143/JJAP.49.06GE042-s2.0-77955321322WOS:000278966300019