Fabry-Perot type antireflective coatings for binary mask applications in ArF and F <inf>2</inf> excimer laser lithographies

Chen, H.L.H.L.ChenLee, C.C.C.C.LeeChuang, Y.F.Y.F.ChuangLiu, M.C.M.C.LiuHsieh, C.I.C.I.HsiehKo, F.H.F.H.KoHSUEN-LI CHEN2020-05-122020-05-122003https://scholars.lib.ntu.edu.tw/handle/123456789/491371Fabry-Perot type antireflective coatings for binary mask applications in ArF and F <inf>2</inf> excimer laser lithographiesconference paper10.1109/CLEOPR.2003.12772932-s2.0-84955317148https://www.scopus.com/inward/record.uri?eid=2-s2.0-84955317148&doi=10.1109%2fCLEOPR.2003.1277293&partnerID=40&md5=00f0bd399cd32eec5be17e45b4ad9293