Impacts of point spread function calibration methods on model-based proximity effect correction for electron-beam-direct-write lithography

Chun-Hung LiuPhilip NgYu-Tian ShenHoi-Tou NgKuen-Yu TsaiKUEN-YU TSAI2018-09-102018-09-102010-06http://scholars.lib.ntu.edu.tw/handle/123456789/359316Impacts of point spread function calibration methods on model-based proximity effect correction for electron-beam-direct-write lithographyconference paper