Rapidly selective growth of nanoparticles by electron-beam and optical lithographies with chemically amplified resists

Chen, H.L.H.L.ChenChu, Y.H.Y.H.ChuKuo, C.I.C.I.KuoLiu, F.K.F.K.LiuKo, F.H.F.H.KoChu, T.C.T.C.ChuHSUEN-LI CHEN2020-05-122020-05-122005https://scholars.lib.ntu.edu.tw/handle/123456789/491353Rapidly selective growth of nanoparticles by electron-beam and optical lithographies with chemically amplified resistsjournal article10.1149/1.18450512-s2.0-13444270465https://www.scopus.com/inward/record.uri?eid=2-s2.0-13444270465&doi=10.1149%2f1.1845051&partnerID=40&md5=56555151a4df2a387f35a1942c6be88f