Optical metrology of shape-varying nano-patterned gratings by analyzing the scattering signals in their pupil images

Yen-Min LeeJia-Han LiFu-Min WangHsin-Hung ChengYu-Tian ShenKuen-Yu TsaiAlek C. ChenKUEN-YU TSAI2018-09-102018-09-102011-10http://scholars.lib.ntu.edu.tw/handle/123456789/366473Optical metrology of shape-varying nano-patterned gratings by analyzing the scattering signals in their pupil imagesconference paper