Pull-in Dynamics of Electrostatically-Actuated microstructures

R. K. GuptaY.-J. YangE. S. HungG. K. AnanthasureshS. D. Senturia,S. D. SenturiaYAO-JOE YANG2021-11-252021-11-251996https://scholars.lib.ntu.edu.tw/handle/123456789/587796Late News, Hilton Head, SCPull-in Dynamics of Electrostatically-Actuated microstructuresconference paper