Wu, S. K.S. K.WuChen, J. Z.J. Z.ChenWu, Y. J.Y. J.WuWang, J. Y.J. Y.WangYu, M. N.M. N.YuChen, F. R.F. R.ChenKai, J. J.J. J.KaiWuSK2008-11-192018-06-282008-11-192018-06-282001http://ntur.lib.ntu.edu.tw//handle/246246/86854application/pdf753321 bytesapplication/pdfen-USInterfacial microstructures of rf-sputtered TiNi shape memory alloy thin films on (100) siliconjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/86854/1/90.pdf