Automatic probe alignment for atomic force microscope

Hung, S.-K.S.-K.HungTsai, C.-F.C.-F.TsaiHsu, Y.-P.Y.-P.HsuTzou, D.-J.D.-J.TzouLin, M.-H.M.-H.LinLI-CHEN FU2020-05-042020-05-042005https://scholars.lib.ntu.edu.tw/handle/123456789/488926Automatic probe alignment for atomic force microscopeconference paper10.1109/ICMECH.2005.1529383https://www.scopus.com/inward/record.uri?eid=2-s2.0-33748887229&doi=10.1109%2fICMECH.2005.1529383&partnerID=40&md5=f3a299d1377f5d3b826b5f97f7ccb086