Thin silicon shadow masks for Organic Light Emitting Diodes (OLED) deposition processes

Tseng, C.-C.C.-C.TsengChiu, C.-W.C.-W.ChiuZhung, K.-X.K.-X.ZhungLee, J.-H.J.-H.LeeGUO-DUNG JOHN SUJIUN-HAW LEE2020-06-112020-06-112007https://scholars.lib.ntu.edu.tw/handle/123456789/498338Thin silicon shadow masks for Organic Light Emitting Diodes (OLED) deposition processesconference paper10.1117/12.6924402-s2.0-34247336894https://www.scopus.com/inward/record.uri?eid=2-s2.0-34247336894&doi=10.1117%2f12.692440&partnerID=40&md5=422de2be9334546885c62798ac565190