Optimization of Ohmic metal contacts for advanced GaAs-based CMOS device

Chang, W.H.W.H.ChangChiang, T.H.T.H.ChiangLin, T.D.T.D.LinChen, Y.H.Y.H.ChenWu, K.H.K.H.WuHuang, T.S.T.S.HuangHong, M.M.HongMINGHWEI HONG2012-10-192018-06-282012-10-192018-06-282012http://ntur.lib.ntu.edu.tw//handle/246246/242882en-US[SDGs]SDG7Optimization of Ohmic metal contacts for advanced GaAs-based CMOS devicejournal article10.1116/1.3687418http://ntur.lib.ntu.edu.tw/bitstream/246246/242882/-1/14.pdf