Hsien-Shun LiaoBo-Jing JuangKuang-Yuh HuangEn-Te HwuChia-Seng ChangKUANG-YUH HUANG2021-11-042021-11-042011https://scholars.lib.ntu.edu.tw/handle/123456789/586452Hokkaido, JapanSpring Constant Calibration of Micro-cantilever by Astigmatic Detection Systemconference paper