Provably Good Max-Min-m-Neighbor-TSP-Based Subfield Scheduling for Electron-Beam Photomask Fabrication

Zhi-Wen LinShao-Yun FangYao-Wen ChangFellowIEEEWei-Cheng RaoChieh-Hsiung KuanCHIEH-HSIUNG KUAN2019-10-312019-10-312018https://scholars.lib.ntu.edu.tw/handle/123456789/429867Provably Good Max-Min-m-Neighbor-TSP-Based Subfield Scheduling for Electron-Beam Photomask Fabricationjournal article10.1109/iccad.2015.73725962-s2.0-84964460652