Electrical characterisation of the insulating property of Ta2O5 in Al-Ta2O5-SiO2-Si capacitors by a low-frequency

Dept. of Electr. Eng., National Taiwan Univ.Hwu, J.-G.J.-G.HwuLin, S.-T.S.-T.LinHwuJG2007-04-192018-07-062007-04-192018-07-061990-10N/Ahttp://ntur.lib.ntu.edu.tw//handle/246246/2007041910042720application/pdf503372 bytesapplication/pdfen-USElectrical characterisation of the insulating property of Ta2O5 in Al-Ta2O5-SiO2-Si capacitors by a low-frequencyjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910042720/1/00217100.pdf