Effect of Fast Pulling the Starting Oxide Out of Furnace on the Radiation Hardness of MOS Capacitors with Reoxidixed-Nitrided Oxides

胡振國Wu, Y. L.Y. L.WuHwu, Jenn-GwoJenn-GwoHwu2009-04-272018-07-062009-04-272018-07-061992http://ntur.lib.ntu.edu.tw//handle/246246/153896en-USEffect of Fast Pulling the Starting Oxide Out of Furnace on the Radiation Hardness of MOS Capacitors with Reoxidixed-Nitrided Oxidesreport